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Scientific article
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English

Design, simulation, fabrication, packaging, and characterization of a MEMS-based mirror array for femtosecond pulse-shaping in phase and amplitude

Contributors

Weber, Stefan; Bonacina, Luigi; Noell, Wilfried; Kiselev, Denis; Extermann, Jérôme; Jutzi, Fabio; Lani, Sébastien; Nenadl, Ondrej; Wolf, Jean-Pierre; de Rooij, Nico F.

Published in

Review of scientific instruments, vol. 82, no. 7, 075106

Publication date

2011

Abstract

We present an in-detail description of the design, simulation, fabrication, and packaging of a linear micromirror array specifically designed for temporal pulse shaping of ultrashort laser pulses. The innovative features of this device include a novel comb-drive actuator allowing both piston and tilt motion for phase- and amplitude-shaping, and an X-shaped laterally reinforced spring preventing lateral snap-in while providing high flexibility for both degrees of freedom.

UNIGE affiliation entities

UNIGE research groups

Citation (ISO format)

WEBER, Stefan et al. Design, simulation, fabrication, packaging, and characterization of a MEMS-based mirror array for femtosecond pulse-shaping in phase and amplitude. In: Review of scientific instruments, 2011, vol. 82, n° 7, p. 075106. doi: 10.1063/1.3606440

Main files (1)

Article (Published version)

Identifiers

Additional URL for this publication

http://scitation.aip.org/content/aip/journal/rsi/82/7/10.1063/1.3606440

Journal ISSN

0034-6748
593views
570downloads

Technical informations

Creation

10/06/2016 17:33:00

First validation

10/06/2016 17:33:00

Update

15/03/2023 00:27:25

Status update

15/03/2023 00:27:24

Last indexation

31/10/2024 03:41:09
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