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Scientific article
Open access
English

Design, simulation, fabrication, packaging, and characterization of a MEMS-based mirror array for femtosecond pulse-shaping in phase and amplitude

Published inReview of scientific instruments, vol. 82, no. 7, 075106
Publication date2011
Abstract

We present an in-detail description of the design, simulation, fabrication, and packaging of a linear micromirror array specifically designed for temporal pulse shaping of ultrashort laser pulses. The innovative features of this device include a novel comb-drive actuator allowing both piston and tilt motion for phase- and amplitude-shaping, and an X-shaped laterally reinforced spring preventing lateral snap-in while providing high flexibility for both degrees of freedom.

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Citation (ISO format)
WEBER, Stefan et al. Design, simulation, fabrication, packaging, and characterization of a MEMS-based mirror array for femtosecond pulse-shaping in phase and amplitude. In: Review of scientific instruments, 2011, vol. 82, n° 7, p. 075106. doi: 10.1063/1.3606440
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ISSN of the journal0034-6748
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Technical informations

Creation06/10/2016 5:33:00 PM
First validation06/10/2016 5:33:00 PM
Update time03/15/2023 12:27:25 AM
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