Design, simulation, fabrication, packaging, and characterization of a MEMS-based mirror array for femtosecond pulse-shaping in phase and amplitude
Published inReview of scientific instruments, vol. 82, no. 7, 075106
Publication date2011
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WEBER, Stefan et al. Design, simulation, fabrication, packaging, and characterization of a MEMS-based mirror array for femtosecond pulse-shaping in phase and amplitude. In: Review of scientific instruments, 2011, vol. 82, n° 7, p. 075106. doi: 10.1063/1.3606440
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- PID : unige:84476
- DOI : 10.1063/1.3606440
ISSN of the journal0034-6748