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Design, simulation, fabrication, packaging, and characterization of a MEMS-based mirror array for femtosecond pulse-shaping in phase and amplitude

Authors
Noell, Wilfried
Jutzi, Fabio
Lani, Sébastien
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Published in Review of Scientific Instruments. 2011, vol. 82, no. 7, p. 075106
Abstract We present an in-detail description of the design, simulation, fabrication, and packaging of a linear micromirror array specifically designed for temporal pulse shaping of ultrashort laser pulses. The innovative features of this device include a novel comb-drive actuator allowing both piston and tilt motion for phase- and amplitude-shaping, and an X-shaped laterally reinforced spring preventing lateral snap-in while providing high flexibility for both degrees of freedom.
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Research group Groupe Wolf
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WEBER, Stefan et al. Design, simulation, fabrication, packaging, and characterization of a MEMS-based mirror array for femtosecond pulse-shaping in phase and amplitude. In: Review of Scientific Instruments, 2011, vol. 82, n° 7, p. 075106. https://archive-ouverte.unige.ch/unige:84476

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Deposited on : 2016-06-13

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