Following the Phase II upgrade of the CERN Large Hadron Collider (LHC) currently foreseen in 2022–2023, the High Luminosity LHC (HL-LHC) is expected to deliver a peak luminosity in excess of 5×1034cm−2s−1 and an integrated luminosity of order 3000fb−1 until 2033. The ATLAS Collaboration plans to replace the existing Inner Tracking Detector by a new tracker, with readout electronics as well as silicon pixel and strip sensor technology capable of maintaining the excellent tracking performance of the existing tracker in the severe radiation and high collision rate environment of the HL-LHC. The promising super-module integration concept extends the proven design of the existing barrel silicon strip tracker to the HL-LHC, with double-sided stereo silicon micro-strip modules assembled into a low mass local support structure. The Super-Module R&D program is described, with reference to HL-LHC requirements, and key prototype results are summarized.