Large linear micromirror array for UV femtosecond laser pulse shaping
Presented atFreiburg (Germany), 11-14th June 2008
Published in2008 IEEE/LEOS Internationall Conference on Optical MEMs and Nanophotonics, p. 39-40
PublisherIEEE
Publication date2008
Abstract
Keywords
- Micromirror
- Vertical comb drive
- SOI
- Timed DRIE
- UV-NIR femtosecond laser pulse shaping
- Biomolecules
Affiliation entities
Citation (ISO format)
WALDIS, Severin et al. Large linear micromirror array for UV femtosecond laser pulse shaping. In: 2008 IEEE/LEOS Internationall Conference on Optical MEMs and Nanophotonics. Freiburg (Germany). [s.l.] : IEEE, 2008. p. 39–40. doi: 10.1109/OMEMS.2008.4607817
Main files (1)
Proceedings chapter (Published version)
Identifiers
- PID : unige:37872
- DOI : 10.1109/OMEMS.2008.4607817
Additional URL for this publicationhttp://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=4607817
ISBN978-1-4244-1917-3
