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Title

Large linear micromirror array for UV femtosecond laser pulse shaping

Authors
Waldis, Severin
Noell, Wilfried
de Rooij, Nico F.
Published in 2008 IEEE/LEOS Internationall Conference on Optical MEMs and Nanophotonics. Freiburg (Germany) - 11-14th June 2008 - IEEE. 2008, p. 39-40
Abstract We are fabricating a bulk-micromachined micromirror device for laser pulse shaping applications on femtosecond time scales. An array of micromirrors is used to individually retard or diminish certain laser frequencies spanning from the UV to the near-infrared. The individual mirrors are fixed by two springs on either side and can be tilted (amplitude modulation) or moved out-of plane (phase modulation) using asymmetrical or symmetrical vertical comb drives, respectively.
Keywords MicromirrorVertical comb driveSOITimed DRIEUV-NIR femtosecond laser pulse shapingBiomolecules
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ISBN: 978-1-4244-1917-3
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WALDIS, Severin et al. Large linear micromirror array for UV femtosecond laser pulse shaping. In: 2008 IEEE/LEOS Internationall Conference on Optical MEMs and Nanophotonics. Freiburg (Germany). [s.l.] : IEEE, 2008. p. 39-40. https://archive-ouverte.unige.ch/unige:37872

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Deposited on : 2014-06-16

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