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Proceedings chapter
English

Large linear micromirror array for UV femtosecond laser pulse shaping

Presented at Freiburg (Germany), 11-14th June 2008
PublisherIEEE
Publication date2008
Abstract

We are fabricating a bulk-micromachined micromirror device for laser pulse shaping applications on femtosecond time scales. An array of micromirrors is used to individually retard or diminish certain laser frequencies spanning from the UV to the near-infrared. The individual mirrors are fixed by two springs on either side and can be tilted (amplitude modulation) or moved out-of plane (phase modulation) using asymmetrical or symmetrical vertical comb drives, respectively.

Keywords
  • Micromirror
  • Vertical comb drive
  • SOI
  • Timed DRIE
  • UV-NIR femtosecond laser pulse shaping
  • Biomolecules
Citation (ISO format)
WALDIS, Severin et al. Large linear micromirror array for UV femtosecond laser pulse shaping. In: 2008 IEEE/LEOS Internationall Conference on Optical MEMs and Nanophotonics. Freiburg (Germany). [s.l.] : IEEE, 2008. p. 39–40. doi: 10.1109/OMEMS.2008.4607817
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Proceedings chapter (Published version)
accessLevelRestricted
Identifiers
ISBN978-1-4244-1917-3
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5downloads

Technical informations

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