Proceedings chapter (Published version) (3.5 MB) - 
Limited access to UNIGEOther version: http://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=4607817
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Chapitre d'actes
unige:37872 
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Large linear micromirror array for UV femtosecond laser pulse shaping |
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| Authors | ||
| Published in | 2008 IEEE/LEOS Internationall Conference on Optical MEMs and Nanophotonics. Freiburg (Germany) - 11-14th June 2008 - IEEE. 2008, p. 39-40 | |
| Abstract | We are fabricating a bulk-micromachined micromirror device for laser pulse shaping applications on femtosecond time scales. An array of micromirrors is used to individually retard or diminish certain laser frequencies spanning from the UV to the near-infrared. The individual mirrors are fixed by two springs on either side and can be tilted (amplitude modulation) or moved out-of plane (phase modulation) using asymmetrical or symmetrical vertical comb drives, respectively. | |
| Keywords | Micromirror — Vertical comb drive — SOI — Timed DRIE — UV-NIR femtosecond laser pulse shaping — Biomolecules | |
| Identifiers | ISBN: 978-1-4244-1917-3 | |
| Full text |
Proceedings chapter (Published version) (3.5 MB) - Limited access to UNIGE Other version: http://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=4607817 |
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| Structures | ||
| Citation (ISO format) | WALDIS, Severin et al. Large linear micromirror array for UV femtosecond laser pulse shaping. In: 2008 IEEE/LEOS Internationall Conference on Optical MEMs and Nanophotonics. Freiburg (Germany). [s.l.] : IEEE, 2008. p. 39-40. doi: 10.1109/OMEMS.2008.4607817 https://archive-ouverte.unige.ch/unige:37872 |
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