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Title

Large linear micromirror array for UV femtosecond laser pulse shaping
Authors
Waldis, Severin
Weber, Stefan
Noell, Wilfried
Extermann, Jérôme
Kiselev, Denis
Bonacina, Luigi
Wolf, Jean-Pierre
de Rooij, Nico F.
Published in 2008 IEEE/LEOS Internationall Conference on Optical MEMs and Nanophotonics. Freiburg (Germany) - 11-14th June 2008 - IEEE. 2008, p. 39-40
Abstract We are fabricating a bulk-micromachined micromirror device for laser pulse shaping applications on femtosecond time scales. An array of micromirrors is used to individually retard or diminish certain laser frequencies spanning from the UV to the near-infrared. The individual mirrors are fixed by two springs on either side and can be tilted (amplitude modulation) or moved out-of plane (phase modulation) using asymmetrical or symmetrical vertical comb drives, respectively.
Keywords Micromirror — Vertical comb drive — SOI — Timed DRIE — UV-NIR femtosecond laser pulse shaping — Biomolecules
Identifiers
ISBN: 978-1-4244-1917-3
Full text
Proceedings chapter (Published version) (3.5 MB) - document accessible for UNIGE members only Limited access to UNIGE
Other version: http://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=4607817
Structures
Faculté des sciences / Section de physique / Groupe de physique appliquée
Citation
(ISO format) 		WALDIS, Severin et al. Large linear micromirror array for UV femtosecond laser pulse shaping. In: 2008 IEEE/LEOS Internationall Conference on Optical MEMs and Nanophotonics. Freiburg (Germany). [s.l.] : IEEE, 2008. p. 39-40. https://archive-ouverte.unige.ch/unige:37872

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Deposited on : 2014-06-16

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