Scientific article

Linear micromirror array for broadband femtosecond pulse shaping in phase and amplitude

Publication date2009

We are developing a linear array of micromirrors designed for optical, femtosecond laser pulse shaping. It is a bulkmicromachined device, capable of retarding or diminishing certain laser frequencies in order to perform phase and amplitude modulation within a frequency band spanning the UV to the near-infrared. The design consists of a linear array of mirrors fixed on either side by springs. They feature two degrees of freedom: Out-of-plane motion for phase shifting and rotational motion for binary amplitude modulation, both realized using vertical comb drives. The first applications will include femtosecond discrimination experiments on biomolecules.

  • Micromirrors
  • UV-NIR femtosecond laser pulse shaping
  • Vertical comb drives
  • Timed DRIE
Citation (ISO format)
WEBER, Stefan et al. Linear micromirror array for broadband femtosecond pulse shaping in phase and amplitude. In: Proceedings of SPIE, the International Society for Optical Engineering, 2009, p. 720805–720805–6. doi: 10.1117/12.808162
Main files (1)
Article (Published version)
ISSN of the journal0277-786X

Technical informations

Creation06/16/2014 10:51:00 AM
First validation06/16/2014 10:51:00 AM
Update time03/14/2023 9:21:11 PM
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