Scientific article
Open access

Ultrathin complex oxide nanomechanical resonators

Published inCommunications physics, vol. 3, no. 1, 163
Publication date2020-09-18
First online date2020-09-18

Complex oxide thin films and heterostructures exhibit a variety of electronic phases, often controlled by the mechanical coupling between film and substrate. Recently it has become possible to isolate epitaxially grown single-crystalline layers of these materials, enabling the study of their properties in the absence of interface effects. In this work, we use this technique to create nanomechanical resonators made out of SrTiO 3 and SrRuO 3 . Using laser interferometry, we successfully actuate and measure the motion of the nanodrum resonators. By measuring the temperature-dependent mechanical response of the SrTiO 3 resonators, we observe signatures of a structural phase transition, which affects both the strain and mechanical dissipation in the resonators. Here, we demonstrate the feasibility of integrating ultrathin complex oxide membranes for realizing nanoelectromechanical systems on arbitrary substrates and present a novel method of detecting structural phase transitions in these exotic materials.

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Citation (ISO format)
DAVIDOVIKJ, D. et al. Ultrathin complex oxide nanomechanical resonators. In: Communications physics, 2020, vol. 3, n° 1, p. 163. doi: 10.1038/s42005-020-00433-y
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ISSN of the journal2399-3650

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