Scientific article
English

Submicron processing of InAs based quantum wells: A new, highly selective wet etchant for AlSb

Published inApplied physics letters, vol. 70, no. 11, p. 1435-1437
Publication date1997-03-17
Affiliation entities Not a UNIGE publication
Research groups
Citation (ISO format)
MORPURGO, Alberto et al. Submicron processing of InAs based quantum wells: A new, highly selective wet etchant for AlSb. In: Applied physics letters, 1997, vol. 70, n° 11, p. 1435–1437. doi: 10.1063/1.118599
Main files (1)
Article (Published version)
accessLevelRestricted
Identifiers
Additional URL for this publicationhttp://aip.scitation.org/doi/10.1063/1.118599
Journal ISSN0003-6951
130views
0downloads

Technical informations

Creation09/11/2021 12:14:00
First validation09/11/2021 12:14:00
Update time16/03/2023 02:46:08
Status update16/03/2023 02:46:07
Last indexation01/11/2024 00:43:39
All rights reserved by Archive ouverte UNIGE and the University of GenevaunigeBlack