Improved thin film growth using Slow Kinetics Intermittent Sputtering
Published inApplied Surface Science, vol. 516, no. 146077
Publication date2020
Abstract
Keywords
- Epitaxial ultra-thin films
- Sputtering
- Growth temperature
- Surface quality
- Crystalline quality
Affiliation entities
Research groups
Funding
- Swiss National Science Foundation - Division II grant 200021_178782
Citation (ISO format)
WEYMANN, Christian et al. Improved thin film growth using Slow Kinetics Intermittent Sputtering. In: Applied Surface Science, 2020, vol. 516, n° 146077. doi: 10.1016/j.apsusc.2020.146077
Main files (1)
Article (Published version)
Identifiers
- PID : unige:152642
- DOI : 10.1016/j.apsusc.2020.146077
Additional URL for this publicationhttps://linkinghub.elsevier.com/retrieve/pii/S0169433220308333
Journal ISSN0169-4332