Improved film density for coatings at grazing angle of incidence in high power impulse magnetron sputtering with positive pulse
ContributorsAvino, F.; Fonnesu, D.; Koettig, T.; Bonura, Marco ; Senatore, Carmine ; Perez Fontenla, A.T.; Sublet, A.; Taborelli, M.
Published inThin Solid Films, vol. 706, no. 138058
Publication date2020
Abstract
Research group
Citation (ISO format)
AVINO, F. et al. Improved film density for coatings at grazing angle of incidence in high power impulse magnetron sputtering with positive pulse. In: Thin Solid Films, 2020, vol. 706, n° 138058. doi: 10.1016/j.tsf.2020.138058
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Identifiers
- PID : unige:141034
- DOI : 10.1016/j.tsf.2020.138058
ISSN of the journal0040-6090