Improved film density for coatings at grazing angle of incidence in high power impulse magnetron sputtering with positive pulse
ContributorsAvino, F.; Fonnesu, D.; Koettig, T.; Bonura, Marco ; Senatore, Carmine ; Perez Fontenla, A.T.; Sublet, A.; Taborelli, M.
Published inThin Solid Films, vol. 706, no. 138058
Publication date2020
Abstract
Affiliation entities
Research groups
Citation (ISO format)
AVINO, F. et al. Improved film density for coatings at grazing angle of incidence in high power impulse magnetron sputtering with positive pulse. In: Thin Solid Films, 2020, vol. 706, n° 138058. doi: 10.1016/j.tsf.2020.138058
Main files (1)
Article (Published version)
Identifiers
- PID : unige:141034
- DOI : 10.1016/j.tsf.2020.138058
Journal ISSN0040-6090