The realization and performance of vibration energy harvesting MEMS devices based on an epitaxial piezoelectric thin film
Published inSmart Materials and Structures, vol. 20, no. 2, 025015
Publication date2011
Abstract
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Citation (ISO format)
ISARAKORN, D et al. The realization and performance of vibration energy harvesting MEMS devices based on an epitaxial piezoelectric thin film. In: Smart Materials and Structures, 2011, vol. 20, n° 2, p. 025015. doi: 10.1088/0964-1726/20/2/025015
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Identifiers
- PID : unige:114128
- DOI : 10.1088/0964-1726/20/2/025015
ISSN of the journal0964-1726