Proceedings chapter
English

High-GF planar aluminium-silicon hybrid strain transducers

Presented atDenver (CO), 21-25 June 2009
PublisherIEEE
Publication date2009
Abstract

We demonstrate here a simple planar aluminium-silicon strain sensor incorporating an external aluminium ohmic shunt (metal-semiconductor hybrid) which exhibits a geometrically enhanced room-temperature gauge factor (GF) of up to 843 under uni-axial tensile strains of up of 8 times 10 -5 for a silicon p-type doping level of 1 times 10 17 cm -3 . We also show that the GF is dependent on the silicon doping density; a GF of 317 being demonstrated for a p-type doping density of 1 times 10 20 cm -3 . Moreover a GF well above 1000 is possible in more lightly doped samples. The observed behaviour, to be contrasted with the gauge factor of -93 observed in homogeneous p-type silicon, is the result of the stress-induced anisotropy in the silicon conductivity that acts to deflect the current away from the metallic shunt for tensile strains.

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Citation (ISO format)
ROWE, A.C.H., RENNER, Christoph, ARSCOTT, S. High-GF planar aluminium-silicon hybrid strain transducers. In: TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference. Denver (CO). [s.l.] : IEEE, 2009. doi: 10.1109/SENSOR.2009.5285512
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Proceedings chapter (Published version)
accessLevelRestricted
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Additional URL for this publicationhttp://ieeexplore.ieee.org/document/5285512/
ISBN978-1-4244-4190-7
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