Finite element analysis and experiments on a silicon membrane actuated by an epitaxial PZT thin film for localized-mass sensing applications
Published inSensors and Actuators. B, Chemical, vol. 153, no. 1, p. 54-63
Publication date2011
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ISARAKORN, D. et al. Finite element analysis and experiments on a silicon membrane actuated by an epitaxial PZT thin film for localized-mass sensing applications. In: Sensors and Actuators. B, Chemical, 2011, vol. 153, n° 1, p. 54–63. doi: 10.1016/j.snb.2010.10.009
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- PID : unige:114280
- DOI : 10.1016/j.snb.2010.10.009
ISSN of the journal0925-4005