Epitaxial piezoelectric MEMS on silicon
Published inJournal of Micromechanics and Microengineering, vol. 20, no. 5, 055008
Publication date2010
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ISARAKORN, D et al. Epitaxial piezoelectric MEMS on silicon. In: Journal of Micromechanics and Microengineering, 2010, vol. 20, n° 5, p. 055008. doi: 10.1088/0960-1317/20/5/055008
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- PID : unige:114276
- DOI : 10.1088/0960-1317/20/5/055008
ISSN of the journal0960-1317